Usage Rates for the Equipment AT JASMiN

Item	$ / Unit		Unit
	Academic	Non-Academic
Entrance	10	20	1 day
Mask Aligner	45	90	1 hour
Sputterer3*	45	90	1 hour
Spin Coater1*	20	30	1 hour
Profilometer2*	10	20	30 minutes
Probe Station	20	40	1 hour
Wire Bonder	20	40	1 hour
Wyko	40	80	1 hour
Process Assistance	75	75	1 hour
XeF2 etcher	25	50	first 2 hours
	5	10	per hour after

1* - No charge when used with Mask Aligner

2* - No charge when used with Mask Aligner AND Sputterer

3* - Special material usage charges:
$30/minute for platinum target
$23/minute for gold target