Research LabsOpto-Electronics LaboratoryContact: Hong-Koo Kim The Opto-Electronics Laboratory is equipped for the fabrication and characterization of electronic and opto-electronic materials and devices. III-V compound semiconductor heterostructures are grown by a metal organic chemical vapor deposition system. Various functional films are also grown using radio-frequency planar-magnetron sputter systems, such as rare-earthed doped oxides and piezoelectric/ferroelectric films, and III-V refractory semiconductors. Facilities are available for a broad spectrum of microelectronic processing and fabrication such as photolithography, plasma etching, deposition, oxidation, diffusion, and annealing. Characterization facilities include a doping profiler, a probe station, a semiconductor parameter analyzer, a Hall-effect measurement system, a deep level transient spectroscopy system, and various optical characterization setups for waveguide materials and devices.
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Marlin Mickle develops technology that may replace barcodes as the universal identifier.
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